JPH035804Y2 - - Google Patents

Info

Publication number
JPH035804Y2
JPH035804Y2 JP1985022537U JP2253785U JPH035804Y2 JP H035804 Y2 JPH035804 Y2 JP H035804Y2 JP 1985022537 U JP1985022537 U JP 1985022537U JP 2253785 U JP2253785 U JP 2253785U JP H035804 Y2 JPH035804 Y2 JP H035804Y2
Authority
JP
Japan
Prior art keywords
environment
clean bench
clean
supply chamber
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985022537U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61141642U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985022537U priority Critical patent/JPH035804Y2/ja
Publication of JPS61141642U publication Critical patent/JPS61141642U/ja
Application granted granted Critical
Publication of JPH035804Y2 publication Critical patent/JPH035804Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1985022537U 1985-02-21 1985-02-21 Expired JPH035804Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985022537U JPH035804Y2 (en]) 1985-02-21 1985-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985022537U JPH035804Y2 (en]) 1985-02-21 1985-02-21

Publications (2)

Publication Number Publication Date
JPS61141642U JPS61141642U (en]) 1986-09-02
JPH035804Y2 true JPH035804Y2 (en]) 1991-02-14

Family

ID=30514922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985022537U Expired JPH035804Y2 (en]) 1985-02-21 1985-02-21

Country Status (1)

Country Link
JP (1) JPH035804Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48106587U (en]) * 1972-03-13 1973-12-11
JPS57131817U (en]) * 1981-02-13 1982-08-17

Also Published As

Publication number Publication date
JPS61141642U (en]) 1986-09-02

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